Inventor
AANGENENT WILHELMUS HENRICUS THEODORUS MARIA
NL14 patents
⚠️ This page may combine multiple inventors who share the name “AANGENENT WILHELMUS HENRICUS THEODORUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS9927721B2Mar 27, 2018
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method
ASML NETHERLANDS BV2 citations68
US10401743B2Sep 3, 2019
Control system, positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations67
US10904994B2Jan 26, 2021
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations60
US10481498B2Nov 19, 2019
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
ASML NETHERLANDS BV1 citations57
US10499485B2Dec 3, 2019
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations50
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US10095123B2Oct 9, 2018
Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program
ASML NETHERLANDS BV0 citations47
US9383659B2Jul 5, 2016
Positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations46
US9715182B2Jul 25, 2017
Lithographic apparatus, substrate support system, device manufacturing method and control program
ASML NETHERLANDS BV1 citations45
US9897926B2Feb 20, 2018
Stage positioning system and lithographic apparatus
ASML NETHERLANDS BV0 citations43
US10750604B2Aug 18, 2020
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
ASML NETHERLANDS BV0 citations36