Inventor
VAN DER MEULEN STAN HENRICUS
NL6 patents
Patents
6 patentsUS10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US10401743B2Sep 3, 2019
Control system, positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations67
US11828344B2Nov 28, 2023
Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations49
US10705438B2Jul 7, 2020
Lithographic method
ASML NETHERLANDS BV0 citations48
US10571814B2Feb 25, 2020
Lithographic method
ASML NETHERLANDS BV0 citations48
US9897926B2Feb 20, 2018
Stage positioning system and lithographic apparatus
ASML NETHERLANDS BV0 citations43