Inventor
SAITO YUKIMASA
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SAITO YUKIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS6383300B1May 7, 2002
Heat treatment apparatus and cleaning method of the same
TOKYO ELECTRON LTD458 citations98
US6807971B2Oct 26, 2004
Heat treatment apparatus and cleaning method of the same
TOKYO ELECTRON LTD56 citations96
US6159298ADec 12, 2000
Thermal processing system
TOKYO ELECTRON LTD71 citations95
US6171104B1Jan 9, 2001
Oxidation treatment method and apparatus
TOKYO ELECTRON LTD40 citations92
US6936108B1Aug 30, 2005
Heat treatment device
TOKYO ELECTRON LTD9 citations73
US10786837B2Sep 29, 2020
Method for cleaning chamber of substrate processing apparatus
TOKYO ELECTRON LTD3 citations71
US7479619B2Jan 20, 2009
Thermal processing unit
TOKYO ELECTRON LTD4 citations62
US7144823B2Dec 5, 2006
Thermal treatment apparatus
TOKYO ELECTRON LTD2 citations62
US7044731B2May 16, 2006
Heat treatment apparatus
TOKYO ELECTRON LTD2 citations62
US6736636B2May 18, 2004
Thermal processor with gas supply
TOKYO ELECTRON LTD6 citations62
US12172198B2Dec 24, 2024
Gas cluster processing device and gas cluster processing method
TOKYO ELECTRON LTD0 citations58
US11267021B2Mar 8, 2022
Gas cluster processing device and gas cluster processing method
TOKYO ELECTRON LTD0 citations58
US11761075B2Sep 19, 2023
Substrate cleaning apparatus
TOKYO ELECTRON LTD0 citations50