Inventor
SHEN CHING-WEI
TW10 patents
⚠️ This page may combine multiple inventors who share the name “SHEN CHING-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS11003069B2May 11, 2021
High durability extreme ultraviolet photomask
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US9418847B2Aug 16, 2016
Lithography system and method for haze elimination
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US10642148B2May 5, 2020
High durability extreme ultraviolet photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10156784B2Dec 18, 2018
Systems and methods of EUV mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10061191B2Aug 28, 2018
High durability extreme ultraviolet photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9885952B2Feb 6, 2018
Systems and methods of EUV mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9665000B1May 30, 2017
Method and system for EUV mask cleaning with non-thermal solution
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9740094B2Aug 22, 2017
Damage prevention on EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50