Inventor
AIGO TAKASHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “AIGO TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHOWA DENKO KK
5 patentsUS10626520B2Apr 21, 2020
Method for producing epitaxial silicon carbide single crystal wafer
SHOWA DENKO KK6 citations72
US10435813B2Oct 8, 2019
Epitaxial growth method for silicon carbide
SHOWA DENKO KK2 citations72
US11114295B2Sep 7, 2021
Epitaxial silicon carbide single crystal wafer and process for producing the same
SHOWA DENKO KK0 citations62
US10727047B2Jul 28, 2020
Epitaxial silicon carbide single crystal wafer and process for producing the same
SHOWA DENKO KK0 citations51
US10450672B2Oct 22, 2019
Method for producing epitaxial silicon carbide wafers
SHOWA DENKO KK0 citations41
AIGO TAKASHI
3 patentsUS9691607B2Jun 27, 2017
Process for producing epitaxial silicon carbide single crystal substrate and epitaxial silicon carbide single crystal substrate obtained by the same
AIGO TAKASHI2 citations69
US8901570B2Dec 2, 2014
Epitaxial silicon carbide single crystal substrate and process for producing the same
AIGO TAKASHI5 citations69
US8927396B2Jan 6, 2015
Production process of epitaxial silicon carbide single crystal substrate
AIGO TAKASHI0 citations49