Inventor
CHUANG TIEN-SHAO
TW4 patents
Patents
4 patentsUS12394663B2Aug 19, 2025
Isolation with multi-step structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11728206B2Aug 15, 2023
Isolation with multi-step structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11251069B2Feb 15, 2022
Method for forming isolation with multi-step structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10790184B2Sep 29, 2020
Isolation with multi-step structure for FinFET device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51