Inventor
HAMAGUCHI AKIRA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HAMAGUCHI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS7302091B2Nov 27, 2007
Method and apparatus for determining defect detection sensitivity data, control method of defect detection apparatus, and method and apparatus for detecting defect of semiconductor devices
TOSHIBA KK14 citations83
US7600213B2Oct 6, 2009
Pattern data verification method, pattern data creation method, exposure mask manufacturing method, semiconductor device manufacturing method, and computer program product
TOSHIBA KK5 citations62
US8027812B2Sep 27, 2011
Charge trajectory calculating method, system, and program
TOSHIBA KK2 citations60
US9053904B2Jun 9, 2015
Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope
TOSHIBA KK0 citations51
HITACHI HIGH TECH CORP
2 patentsUS11545336B2Jan 3, 2023
Scanning electron microscopy system and pattern depth measurement method
HITACHI HIGH TECH CORP2 citations70
US11302513B2Apr 12, 2022
Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus
HITACHI HIGH TECH CORP1 citations59