Inventor

KASUYA KEIGO

JP17 patents

⚠️ This page may combine multiple inventors who share the name “KASUYA KEIGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KASUYA KEIGO

HITACHI HIGH TECH CORP

Electron source and electron beam device using the same

Electron beam apparatus

Charged particle beam device

Electron source, electron beam device, and method for manufacturing electron source

Charged particle beam device

Electron source, method of manufacturing the same, and electron beam apparatus using the same

Vacuum apparatus

Charged particle gun and charged particle beam system

Thermoelectric field emission electron source and electron beam application device

Electron source, method for manufacturing the same, and electron beam device using the same

Electron source, electron gun, and charged particle beam device

Electron beam apparatus and method for controlling electron beam apparatus

Field emission electron source, method for manufacturing same, and electron beam device

KASUYA KEIGO

Charged particle radiation device

Charged particle beam apparatus, and method of controlling the same

Charged particle beam apparatus, and method of controlling the same

HITACHI LTD

Ion pump and charged particle beam device using the same