Inventor
BATZER RACHEL
US6 patents
Patents
6 patentsUS11608559B2Mar 21, 2023
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP6 citations83
US10604841B2Mar 31, 2020
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP7 citations82
US11015247B2May 25, 2021
Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP6 citations80
US12116669B2Oct 15, 2024
Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP3 citations71
US11101164B2Aug 24, 2021
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP3 citations71
US11702748B2Jul 18, 2023
Wafer level uniformity control in remote plasma film deposition
LAM RES CORP1 citations61