Inventor
VARADARAJAN BHADRI
US11 patents
⚠️ This page may combine multiple inventors who share the name “VARADARAJAN BHADRI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARADARAJAN BHADRI
5 patentsUS10211310B2Feb 19, 2019
Remote plasma based deposition of SiOC class of films
VARADARAJAN BHADRI20 citations93
US8512818B1Aug 20, 2013
Cascaded cure approach to fabricate highly tensile silicon nitride films
VARADARAJAN BHADRI21 citations90
US8211510B1Jul 3, 2012
Cascaded cure approach to fabricate highly tensile silicon nitride films
VARADARAJAN BHADRI33 citations90
US10037905B2Jul 31, 2018
UV and reducing treatment for K recovery and surface clean in semiconductor processing
VARADARAJAN BHADRI7 citations81
US9659769B1May 23, 2017
Tensile dielectric films using UV curing
VARADARAJAN BHADRI9 citations81
LAM RES CORP
4 patentsUS11608559B2Mar 21, 2023
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP6 citations83
US10604841B2Mar 31, 2020
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP7 citations82
US11761079B2Sep 19, 2023
Oxidation resistant protective layer in chamber conditioning
LAM RES CORP5 citations73
US11101164B2Aug 24, 2021
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP3 citations71