Inventor
CITLA BHARGAV
US6 patents
Patents
6 patentsUS9865484B1Jan 9, 2018
Selective etch using material modification and RF pulsing
APPLIED MATERIALS INC109 citations97
US11114306B2Sep 7, 2021
Methods for depositing dielectric material
APPLIED MATERIALS INC3 citations72
US9640385B2May 2, 2017
Gate electrode material residual removal process
APPLIED MATERIALS INC4 citations72
US12057329B2Aug 6, 2024
Selective etch using material modification and RF pulsing
APPLIED MATERIALS INC0 citations62
US10570506B2Feb 25, 2020
Method to improve film quality for PVD carbon with reactive gas and bias power
APPLIED MATERIALS INC0 citations51
US10858727B2Dec 8, 2020
High density, low stress amorphous carbon film, and process and equipment for its deposition
APPLIED MATERIALS INC0 citations40