Inventor
TANNOS JETHRO
US7 patents
Patents
7 patentsUS11114306B2Sep 7, 2021
Methods for depositing dielectric material
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US11631591B2Apr 18, 2023
Methods for depositing dielectric material
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US11566325B2Jan 31, 2023
Silicon carbonitride gapfill with tunable carbon content
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US12482652B2Nov 25, 2025
Method for forming integrated circuit structures
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US11049731B2Jun 29, 2021
Methods for film modification
APPLIED MATERIALS INC0 citations56
US11972943B2Apr 30, 2024
Methods and apparatus for depositing dielectric material
APPLIED MATERIALS INC0 citations48
US11955333B2Apr 9, 2024
Methods and apparatus for processing a substrate
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