Inventor
HAYDEN DOUGLAS BRENTON
US2 patents
Patents
2 patentsUS11164724B2Nov 2, 2021
Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing
APPLIED MATERIALS INC1 citations59
US10008366B2Jun 26, 2018
Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing
APPLIED MATERIALS INC0 citations48