Inventor
YANG DONGQING
US22 patents
⚠️ This page may combine multiple inventors who share the name “YANG DONGQING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS9064816B2Jun 23, 2015
Dry-etch for selective oxidation removal
APPLIED MATERIALS INC188 citations98
US9721789B1Aug 1, 2017
Saving ion-damaged spacers
APPLIED MATERIALS INC117 citations97
US9659753B2May 23, 2017
Grooved insulator to reduce leakage current
APPLIED MATERIALS INC123 citations95
US10699921B2Jun 30, 2020
Semiconductor processing chamber multistage mixing apparatus
APPLIED MATERIALS INC32 citations94
US10679870B2Jun 9, 2020
Semiconductor processing chamber multistage mixing apparatus
APPLIED MATERIALS INC32 citations94
US11417534B2Aug 16, 2022
Selective material removal
APPLIED MATERIALS INC2 citations73
US10964512B2Mar 30, 2021
Semiconductor processing chamber multistage mixing apparatus and methods
APPLIED MATERIALS INC3 citations73
US10134581B2Nov 20, 2018
Methods and apparatus for selective dry etch
APPLIED MATERIALS INC4 citations73
US11276559B2Mar 15, 2022
Semiconductor processing chamber for multiple precursor flow
APPLIED MATERIALS INC3 citations72
US11515179B2Nov 29, 2022
Semiconductor processing chamber multistage mixing apparatus
APPLIED MATERIALS INC0 citations62
US11915950B2Feb 27, 2024
Multi-zone semiconductor substrate supports
APPLIED MATERIALS INC1 citations61
US11361939B2Jun 14, 2022
Semiconductor processing chamber for multiple precursor flow
APPLIED MATERIALS INC1 citations61
US11276590B2Mar 15, 2022
Multi-zone semiconductor substrate supports
APPLIED MATERIALS INC1 citations61
US11101136B2Aug 24, 2021
Process window widening using coated parts in plasma etch processes
APPLIED MATERIALS INC1 citations60
US10297458B2May 21, 2019
Process window widening using coated parts in plasma etch processes
APPLIED MATERIALS INC1 citations60
US11164724B2Nov 2, 2021
Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing
APPLIED MATERIALS INC1 citations59
US12315736B2May 27, 2025
Methods of highly selective silicon oxide removal
APPLIED MATERIALS INC0 citations57
US10008366B2Jun 26, 2018
Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing
APPLIED MATERIALS INC0 citations48