Inventor

CHEN SHANG

JP23 patents

⚠️ This page may combine multiple inventors who share the name “CHEN SHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN SHANG

ASM IP HOLDING BV

Si precursors for deposition of SiN at low temperatures

Deposition of SiN

Si precursors for deposition of SiN at low temperatures

Selective deposition of metallic films

Si precursors for deposition of SiN at low temperatures

Reaction chamber passivation and selective deposition of metallic films

Reaction chamber passivation and selective deposition of metallic films

Selective deposition of metallic films

Reaction chamber passivation and selective deposition of metallic films

Reaction chamber passivation and selective deposition of metallic films

Si precursors for deposition of SiN at low temperatures

Deposition of SiN

Si precursors for deposition of SiN at low temperatures

Formation of SiN thin films

Deposition of SiN

Formation of SiN thin films

Si precursors for deposition of SiN at low temperatures

Formation of SiN thin films

Si precursors for deposition of SiN at low temperatures

Processes for preventing oxidation of metal thin films

Si precursors for deposition of SiN at low temperatures

Deposition of SiN

UNIV CENTRAL CHINA NORMAL

Monatomic metal-doped few-layer molybdenum disulfide electrocatalytic material, preparing method thereof, and method for electrocatalytic nitrogen fixation