Inventor
NISKANEN ANTTI JUHANI
FI17 patents
Patents
17 patentsUS8912101B2Dec 16, 2014
Method for forming Si-containing film using two precursors by ALD
ASM IP HOLDING BV522 citations99
US10741386B2Aug 11, 2020
Deposition of SiN
ASM IP HOLDING BV282 citations98
US10480064B2Nov 19, 2019
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV47 citations97
US10115603B2Oct 30, 2018
Removal of surface passivation
ASM IP HOLDING BV48 citations97
US10041166B2Aug 7, 2018
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV57 citations97
US9803277B1Oct 31, 2017
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV87 citations97
US9490145B2Nov 8, 2016
Removal of surface passivation
ASM IP HOLDING BV78 citations97
US10793946B1Oct 6, 2020
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV17 citations94
US9576792B2Feb 21, 2017
Deposition of SiN
ASM IP HOLDING BV23 citations94
US10741411B2Aug 11, 2020
Removal of surface passivation
ASM IP HOLDING BV19 citations93
US11286562B2Mar 29, 2022
Gas-phase chemical reactor and method of using same
ASM IP HOLDING BV6 citations85
US10262854B2Apr 16, 2019
Deposition of SiN
ASM IP HOLDING BV6 citations84
US11430656B2Aug 30, 2022
Deposition of oxide thin films
ASM IP HOLDING BV2 citations72
US11062914B2Jul 13, 2021
Removal of surface passivation
ASM IP HOLDING BV2 citations72
US12516413B2Jan 6, 2026
Gas-phase chemical reactor and method of using same
ASM IP HOLDING BV0 citations62
US12154785B2Nov 26, 2024
Deposition of oxide thin films
ASM IP HOLDING BV0 citations62
US11367613B2Jun 21, 2022
Deposition of SiN
ASM IP HOLDING BV0 citations62