Inventor
PARK CHANGYUP
KR13 patents
Patents
13 patentsUS11574956B2Feb 7, 2023
Semiconductor device including data storage material pattern
SAMSUNG ELECTRONICS CO LTD2 citations68
US11600776B2Mar 7, 2023
Apparatus for and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations61
US10892410B2Jan 12, 2021
Variable resistance memory devices and methods of manufacturing variable resistance memory devices
SAMSUNG ELECTRONICS CO LTD0 citations61
US11017989B2May 25, 2021
Collimator, fabrication apparatus including the same, and method of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US12185647B2Dec 31, 2024
Variable resistance memory device
SAMSUNG ELECTRONICS CO LTD0 citations59
US11482670B2Oct 25, 2022
Method of fabricating a variable resistance memory device
SAMSUNG ELECTRONICS CO LTD0 citations57
US12431351B2Sep 30, 2025
Method of forming germanium antimony tellurium film
SAMSUNG ELECTRONICS CO LTD0 citations53
US11037992B2Jun 15, 2021
Variable resistance memory device
SAMSUNG ELECTRONICS CO LTD0 citations51
US10818839B2Oct 27, 2020
Apparatus for and method of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations50
US10566530B2Feb 18, 2020
Method of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations50
US12396379B2Aug 19, 2025
Semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations48
US9685318B2Jun 20, 2017
Method of forming semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations48
US12426264B2Sep 23, 2025
Semiconductor devices and data storage systems including the same
SAMSUNG ELECTRONICS CO LTD0 citations47