Inventor
NUNOSHIGE YU
JP9 patents
Patents
9 patentsUS9644266B2May 9, 2017
Film forming apparatus, gas supply device and film forming method
TOKYO ELECTRON LTD364 citations96
US12009217B2Jun 11, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11578408B2Feb 14, 2023
Gas processing apparatus
TOKYO ELECTRON LTD1 citations60
US10767262B2Sep 8, 2020
Gas supply apparatus and gas supply method
TOKYO ELECTRON LTD1 citations60
US11732357B2Aug 22, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US10340176B2Jul 2, 2019
Substrate mounting method and substrate mounting device
TOKYO ELECTRON LTD0 citations49
US11499225B2Nov 15, 2022
Gas processing apparatus and gas processing method
TOKYO ELECTRON LTD0 citations47
US11248293B2Feb 15, 2022
Film-forming apparatus and film-forming method
TOKYO ELECTRON LTD0 citations46
US10864548B2Dec 15, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations40