Inventor
HAN GYEONG HEE
KR4 patents
Patents
4 patentsUS9605797B2Mar 28, 2017
Substrate loading device
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Laser apparatus and laser machining method
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US11612964B2Mar 28, 2023
Laser apparatus and laser machining method
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US11990361B2May 21, 2024
Electrostatic chuck, etching apparatus, and method of manufacturing display device
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