Inventor
VOOGD ROBBERT JAN
NL16 patents
⚠️ This page may combine multiple inventors who share the name “VOOGD ROBBERT JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS9823589B2Nov 21, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV5 citations83
US11281115B2Mar 22, 2022
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations72
US12204255B2Jan 21, 2025
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations61
US11630399B2Apr 18, 2023
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations61
US10401734B2Sep 3, 2019
Lithographic method and apparatus
ASML NETHERLANDS BV1 citations58
US10401723B2Sep 3, 2019
Patterning device
ASML NETHERLANDS BV1 citations57
US10203611B2Feb 12, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US9864282B2Jan 9, 2018
Sensor system for lithography
ASML NETHERLANDS BV0 citations51
US9690207B2Jun 27, 2017
Sensor system for lithography
ASML NETHERLANDS BV0 citations51
US9971254B2May 15, 2018
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9753382B2Sep 5, 2017
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US10732498B2Aug 4, 2020
Patterning device
ASML NETHERLANDS BV0 citations47