Inventor
REMIE MARINUS JAN
NL11 patents
⚠️ This page may combine multiple inventors who share the name “REMIE MARINUS JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS11281115B2Mar 22, 2022
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations72
US10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US10222713B2Mar 5, 2019
Patterning device cooling apparatus
ASML NETHERLANDS BV2 citations71
US12204255B2Jan 21, 2025
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations61
US11630399B2Apr 18, 2023
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations61
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10990025B2Apr 27, 2021
Patterning device cooling apparatus
ASML NETHERLANDS BV0 citations61
US10031428B2Jul 24, 2018
Gas flow optimization in reticle stage environment
ASML NETHERLANDS BV0 citations35