Inventor

ORITO KOICHI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “ORITO KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

3 patents

US11800583B1Oct 24, 2023

TOKYO ELECTRON LTD

2 patents

US7825039B2Nov 2, 2010

Vertical plasma processing method for forming silicon containing film

TOKYO ELECTRON LTD79 citations96

US7094708B2Aug 22, 2006

Method of CVD for forming silicon nitride film on substrate

TOKYO ELECTRON LTD38 citations90

ORITO KOICHI

MITSUBISHI ELECTRIC CORP

Communication system and device

Display

Display, display method, and display system

TOKYO ELECTRON LTD

Vertical plasma processing method for forming silicon containing film

Method of CVD for forming silicon nitride film on substrate