Inventor
JUDY MICHAEL W
US28 patents
⚠️ This page may combine multiple inventors who share the name “JUDY MICHAEL W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANALOG DEVICES INC
20 patentsUS5939633AAug 17, 1999
Apparatus and method for multi-axis capacitive sensing
ANALOG DEVICES INC167 citations99
US6223598B1May 1, 2001
Suspension arrangement for semiconductor accelerometer
ANALOG DEVICES INC73 citations96
US10167189B2Jan 1, 2019
Stress isolation platform for MEMS devices
ANALOG DEVICES INC20 citations93
US7363816B2Apr 29, 2008
Inertial sensor
ANALOG DEVICES INC27 citations92
US7134340B2Nov 14, 2006
Apparatus and method for anchoring micromachined structures
ANALOG DEVICES INC13 citations92
US6148670ANov 21, 2000
Apparatus and method for multi-axis capacitive sensing
ANALOG DEVICES INC25 citations92
US7166911B2Jan 23, 2007
Packaged microchip with premolded-type package
ANALOG DEVICES INC42 citations89
US7083997B2Aug 1, 2006
Bonded wafer optical MEMS process
ANALOG DEVICES INC39 citations87
US9297825B2Mar 29, 2016
Tilt mode accelerometer with improved offset and noise performance
ANALOG DEVICES INC9 citations84
US7795723B2Sep 14, 2010
Capped sensor
ANALOG DEVICES INC13 citations84
US9676614B2Jun 13, 2017
MEMS device with stress relief structures
ANALOG DEVICES INC8 citations83
US6964894B2Nov 15, 2005
Apparatus and method of forming a device layer
ANALOG DEVICES INC13 citations82
US6933163B2Aug 23, 2005
Fabricating integrated micro-electromechanical systems using an intermediate electrode layer
ANALOG DEVICES INC14 citations81
US7327003B2Feb 5, 2008
Sensor system
ANALOG DEVICES INC8 citations74
US10545167B2Jan 28, 2020
Multiple-axis resonant accelerometers
ANALOG DEVICES INC2 citations73
US9410981B2Aug 9, 2016
MEMS sensor with dynamically variable reference capacitance
ANALOG DEVICES INC3 citations73
US6964882B2Nov 15, 2005
Fabricating complex micro-electromechanical systems using a flip bonding technique
ANALOG DEVICES INC11 citations71
US6931170B2Aug 16, 2005
Fiber-attached optical devices with in-plane micromachined mirrors
ANALOG DEVICES INC8 citations71
US7821084B2Oct 26, 2010
Sensor system
ANALOG DEVICES INC1 citations52
US8956904B2Feb 17, 2015
Apparatus and method of wafer bonding using compatible alloy
ANALOG DEVICES INC0 citations41
ZHANG XIN
4 patentsUS8146425B2Apr 3, 2012
MEMS sensor with movable z-axis sensing element
ZHANG XIN31 citations92
US8939029B2Jan 27, 2015
MEMS sensor with movable Z-axis sensing element
ZHANG XIN9 citations84
US8516891B2Aug 27, 2013
Multi-stage stopper system for MEMS devices
ZHANG XIN7 citations84
US8111871B2Feb 7, 2012
Microphone with pressure relief
ZHANG XIN13 citations84