Inventor
KLEBANOV GRIGORY
IL5 patents
Patents
5 patentsUS12347734B2Jul 1, 2025
Examination of a hole formed in a semiconductor specimen
APPLIED MATERIALS ISRAEL LTD0 citations53
US11651509B2May 16, 2023
Method, system and computer program product for 3D-NAND CDSEM metrology
APPLIED MATERIALS ISRAEL LTD0 citations51
US11056404B1Jul 6, 2021
Evaluating a hole formed in an intermediate product
APPLIED MATERIALS ISRAEL LTD1 citations51
US11686571B2Jun 27, 2023
Local shape deviation in a semiconductor specimen
APPLIED MATERIALS ISRAEL LTD0 citations42
US11443420B2Sep 13, 2022
Generating a metrology recipe usable for examination of a semiconductor specimen
APPLIED MATERIALS ISRAEL LTD0 citations41