Inventor
Belau Leonid
US6 patents
Patents
6 patentsUS9673058B1Jun 6, 2017
Method for etching features in dielectric layers
LAM RES CORP24 citations92
US10847374B2Nov 24, 2020
Method for etching features in a stack
LAM RES CORP8 citations80
US12354880B2Jul 8, 2025
High aspect ratio etch with infinite selectivity
LAM RES CORP0 citations60
US12412736B2Sep 9, 2025
Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process
LAM RES CORP0 citations51
US12406852B2Sep 2, 2025
Profile optimization for high aspect ratio memory using an etch front metal catalyst
LAM RES CORP0 citations50
US12488992B2Dec 2, 2025
High aspect ratio dielectric etch with chlorine
LAM RES CORP0 citations47