Inventor

WU ZHEN-CHENG

TW39 patents

⚠️ This page may combine multiple inventors who share the name “WU ZHEN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WU ZHEN-CHENG

TAIWAN SEMICONDUCTOR MFG

Semiconductor structure having an air-gap region and a method of manufacturing the same

Post-ESL porogen burn-out for copper ELK integration

Reliability improvement of SiOC etch with trimethylsilane gas passivation in Cu damascene interconnects

Method of forming copper interconnects

Method of a non-metal barrier copper damascene integration

Interconnect structure with dielectric barrier and fabrication method thereof

Method of making a semiconductor device including barrier layers for copper interconnect

Copper interconnects

Decreasing metal-silicide oxidation during wafer queue time

Impurity doped UV protection layer

Semiconductor device

Copper damascene integration scheme for improved barrier layers

Metal barrier integrity via use of a novel two step PVD-ALD deposition procedure

Structure for improving interlevel conductor connections

Method for forming dielectric film to improve adhesion of low-k film

Method for planarizing semiconductor structures

Method of fabricating barrierless and embedded copper damascene interconnects

Semiconductor device including I/O oxide and nitrided core oxide on substrate

TAIWAN SEMICONDUCTOR MFG CO LTD

Semiconductor structure having an air-gap region and a method of manufacturing the same

Nanostructure field-effect transistor device and method of forming

Semiconductor devices including backside power via and methods of forming the same

Method of manufacturing semiconductor devices including forming an air gap based on removing a recessed sacrificial layer

Dielectric layer, interconnection structure using the same, and manufacturing method thereof

Dielectric layer, interconnection structure using the same, and manufacturing method thereof

Semiconductor device and method for manufacturing the same

Semiconductor device and method for forming the same

Profile control of isolation structures in semiconductor devices

Isolation structure for transistors

HU YEN-CHENG

Method of forming solar cell

Method of fabricating a solar cell

Solar cell and method of fabricating the same

Solar cell

Solar cell

WU ZHEN-CHENG

Impurity doped UV protection layer

Semiconductor device including I/O oxide nitrided core oxide on substrate

TAIWAN SEMICONDUCTOR MANFACTUR

Silicon oxycarbide and silicon carbonitride based materials for MOS devices

SU SHU-HUI

Semiconductor structure having an air-gap region and a method of manufacturing the same

LIU NAI-WEI

Barrier layers for copper interconnect

AU OPTRONICS CORP

Method for fabricating back-contact type solar cell