Inventor
MIYA KATSUHIKO
JP34 patents
⚠️ This page may combine multiple inventors who share the name “MIYA KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
18 patentsUS5927303AJul 27, 1999
Substrate processing apparatus
DAINIPPON SCREEN MFG79 citations96
US7722736B2May 25, 2010
Apparatus for and method of processing a substrate with processing liquid
DAINIPPON SCREEN MFG27 citations92
US7584760B2Sep 8, 2009
Substrate processing apparatus
DAINIPPON SCREEN MFG29 citations92
US7182821B2Feb 27, 2007
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG37 citations92
US6669808B2Dec 30, 2003
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG37 citations92
US7811412B2Oct 12, 2010
Substrate processing apparatus and substrate processing method drying substrate
DAINIPPON SCREEN MFG11 citations84
US7608152B2Oct 27, 2009
Substrate processing apparatus and method
DAINIPPON SCREEN MFG12 citations84
US8029622B2Oct 4, 2011
Substrate processing apparatus, liquid film freezing method and substrate processing method
DAINIPPON SCREEN MFG9 citations83
US7547181B2Jun 16, 2009
Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum
DAINIPPON SCREEN MFG19 citations82
US9431276B2Aug 30, 2016
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG4 citations73
US7503978B2Mar 17, 2009
Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position
DAINIPPON SCREEN MFG7 citations72
US7942976B2May 17, 2011
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG5 citations63
US7823597B2Nov 2, 2010
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG4 citations63
US7767026B2Aug 3, 2010
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG2 citations63
US7373736B2May 20, 2008
Substrate processing apparatus and method with proximity guide and liquid-tight layer
DAINIPPON SCREEN MFG3 citations63
US8020570B2Sep 20, 2011
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG5 citations62
US7964042B2Jun 21, 2011
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG5 citations61
US7607967B2Oct 27, 2009
Substrate processing method and substrate processing apparatus
DAINIPPON SCREEN MFG2 citations53
SCREEN HOLDINGS CO LTD
8 patentsUS10286425B2May 14, 2019
Substrate cleaning method and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD7 citations83
US9976804B2May 22, 2018
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method
SCREEN HOLDINGS CO LTD7 citations83
US10619894B2Apr 14, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10612844B2Apr 7, 2020
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method
SCREEN HOLDINGS CO LTD0 citations51
US9859110B2Jan 2, 2018
Substrate cleaning method and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD0 citations51
US9728396B2Aug 8, 2017
Substrate cleaning method and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10065218B2Sep 4, 2018
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations41
US10586693B2Mar 10, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations40
MIYA KATSUHIKO
6 patentsUS8696825B2Apr 15, 2014
Substrate processing method
MIYA KATSUHIKO7 citations83
US8109282B2Feb 7, 2012
Substrate processing apparatus and substrate processing method
MIYA KATSUHIKO11 citations83
US8075731B2Dec 13, 2011
Substrate processing apparatus and a substrate processing method
MIYA KATSUHIKO14 citations83
US9214331B2Dec 15, 2015
Substrate processing method and substrate processing apparatus
MIYA KATSUHIKO7 citations82
US9922848B2Mar 20, 2018
Apparatus for and method of processing substrate
MIYA KATSUHIKO2 citations72
US8857449B2Oct 14, 2014
Substrate processing apparatus and substrate processing method
MIYA KATSUHIKO2 citations62