Inventor

KOCH GEORGE R

US9 patents

⚠️ This page may combine multiple inventors who share the name “KOCH GEORGE R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US4340462AJul 20, 1982

Adjustable electrode plasma processing chamber

LAM RES CORP401 citations97

US4433951AFeb 28, 1984

Modular loadlock

LAM RES CORP98 citations93

US4483654ANov 20, 1984

Workpiece transfer mechanism

LAM RES CORP48 citations89

KLA TENCOR CORP

2 patents

US6710354B1Mar 23, 2004

Scanning electron microscope architecture and related material handling system

KLA TENCOR CORP49 citations91

US7550744B1Jun 23, 2009

Chamberless substrate handling

KLA TENCOR CORP0 citations51

FLEXIBLE MFG SYSTEMS

1 patent

US4698775AOct 6, 1987

Self-contained mobile reprogrammable automation device

FLEXIBLE MFG SYSTEMS176 citations97

VEECO INSTR INC

1 patent

US4354111AOct 12, 1982

Screen lens array system

VEECO INSTR INC26 citations81

KLA TENCOR TECH CORP

1 patent

US7288774B1Oct 30, 2007

Transverse magnetic field voltage isolator

KLA TENCOR TECH CORP6 citations70

ETEC CORP

1 patent

US3958124AMay 18, 1976

Method and apparatus for sem specimen coating and transfer

ETEC CORP19 citations68