Inventor
KROLAK MICHAEL
US30 patents
⚠️ This page may combine multiple inventors who share the name “KROLAK MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASYST TECHNOLOGIES
12 patentsUS7293950B2Nov 13, 2007
Universal modular wafer transport system
ASYST TECHNOLOGIES72 citations98
US7410340B2Aug 12, 2008
Direct tool loading
ASYST TECHNOLOGIES47 citations96
US6634851B1Oct 21, 2003
Workpiece handling robot
ASYST TECHNOLOGIES70 citations94
US7472788B2Jan 6, 2009
Belt conveyor for use with semiconductor containers
ASYST TECHNOLOGIES18 citations93
US7066707B1Jun 27, 2006
Wafer engine
ASYST TECHNOLOGIES28 citations92
US6677690B2Jan 13, 2004
System for safeguarding integrated intrabay pod delivery and storage system
ASYST TECHNOLOGIES40 citations89
US7445415B2Nov 4, 2008
Direct tool loading
ASYST TECHNOLOGIES9 citations84
US7217076B2May 15, 2007
Semiconductor material handling system
ASYST TECHNOLOGIES18 citations84
US7100340B2Sep 5, 2006
Unified frame for semiconductor material handling system
ASYST TECHNOLOGIES16 citations84
US6592679B2Jul 15, 2003
Clean method for vacuum holding of substrates
ASYST TECHNOLOGIES7 citations74
US7597523B2Oct 6, 2009
Variable lot size load port
ASYST TECHNOLOGIES4 citations63
US7585144B2Sep 8, 2009
Variable lot size load port
ASYST TECHNOLOGIES2 citations63
MURATEC AUTOMATION CO LTD
5 patentsUS7798759B2Sep 21, 2010
Modular terminal for high-throughput AMHS
MURATEC AUTOMATION CO LTD10 citations84
US7771151B2Aug 10, 2010
Interface between conveyor and semiconductor process tool load port
MURATEC AUTOMATION CO LTD18 citations84
US7651307B2Jan 26, 2010
Direct tool loading
MURATEC AUTOMATION CO LTD10 citations84
US8376130B2Feb 19, 2013
Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport
MURATEC AUTOMATION CO LTD10 citations82
US7784606B2Aug 31, 2010
Belt conveyor transporting containers used in semiconductor fabrication
MURATEC AUTOMATION CO LTD6 citations74
CROSSING AUTOMATION INC
3 patentsFLEXIBLE MFG SYSTEMS
3 patentsBONORA ANTHONY C
3 patentsUS8851817B2Oct 7, 2014
Universal modular wafer transport system
BONORA ANTHONY C33 citations94
US8882433B2Nov 11, 2014
Integrated systems for interfacing with substrate container storage systems
BONORA ANTHONY C20 citations92
US8851820B2Oct 7, 2014
Substrate container storage system
BONORA ANTHONY C15 citations84