Inventor
TRUMPP HANS-JOACHIM
DE7 patents
Patents
7 patentsUS4502914AMar 5, 1985
Method of making structures with dimensions in the sub-micrometer range
IBM428 citations98
US4589952AMay 20, 1986
Method of making trenches with substantially vertical sidewalls in silicon through reactive ion etching
IBM70 citations94
US5109267AApr 28, 1992
Method for producing an integrated circuit structure with a dense multilayer metallization pattern
IBM73 citations93
US4869781ASep 26, 1989
Method for fabricating a semiconductor integrated circuit structure having a submicrometer length device element
IBM74 citations93
US5055383AOct 8, 1991
Process for making masks with structures in the submicron range
IBM24 citations91
US4816115AMar 28, 1989
Process of making via holes in a double-layer insulation
IBM41 citations87
US4980317ADec 25, 1990
Method of producing integrated semiconductor structures comprising field-effect transistors with channel lengths in the submicron range using a three-layer resist system
IBM20 citations79