Inventor
MATSUZAKA TAKASHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MATSUZAKA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS6511048B1Jan 28, 2003
Electron beam lithography apparatus and pattern forming method
HITACHI LTD20 citations92
US6225011B1May 1, 2001
Method for manufacturing semiconductor devices utilizing plurality of exposure systems
HITACHI LTD38 citations92
US4701620AOct 20, 1987
Electron beam exposure apparatus
HITACHI LTD10 citations73
US4577111AMar 18, 1986
Apparatus for electron beam lithography
HITACHI LTD12 citations73
US4382182AMay 3, 1983
Method of displaying an image of phase contrast in a scanning transmission electron microscope
HITACHI LTD14 citations73
US4808829AFeb 28, 1989
Mark position detection system for use in charged particle beam apparatus
HITACHI LTD8 citations71
US5326979AJul 5, 1994
Electron beam lithography system
HITACHI LTD4 citations61