Inventor
YUMOTO YOSHIJI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “YUMOTO YOSHIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JAPAN SYNTHETIC RUBBER CO LTD
12 patentsUS5580695ADec 3, 1996
Chemically amplified resist
JAPAN SYNTHETIC RUBBER CO LTD58 citations96
US5525457AJun 11, 1996
Reflection preventing film and process for forming resist pattern using the same
JAPAN SYNTHETIC RUBBER CO LTD69 citations96
US5110706AMay 5, 1992
I-line radiation-sensitive alkali-soluble resin composition utilizing 1,2-quinone diazide compound and hydroxy-chalcone additive
JAPAN SYNTHETIC RUBBER CO LTD83 citations96
US4626556ADec 2, 1986
Solvent-soluble organopolysilsesquioxane, process for producing the same, and semi-conductor using the same
JAPAN SYNTHETIC RUBBER CO LTD88 citations95
US5958645ASep 28, 1999
Radiation-sensitive resin composition
JAPAN SYNTHETIC RUBBER CO LTD19 citations92
US5494777AFeb 27, 1996
Radiation sensitive resin composition
JAPAN SYNTHETIC RUBBER CO LTD27 citations92
US5410005AApr 25, 1995
Reflection preventing film and process for forming resist pattern using the same
JAPAN SYNTHETIC RUBBER CO LTD32 citations92
US5332650AJul 26, 1994
Radiation-sensitive composition
JAPAN SYNTHETIC RUBBER CO LTD20 citations92
US5238775AAug 24, 1993
Radiation-sensitive resin composition
JAPAN SYNTHETIC RUBBER CO LTD30 citations91
US5609988AMar 11, 1997
Radiation sensitive resin composition
JAPAN SYNTHETIC RUBBER CO LTD7 citations73
US5482816AJan 9, 1996
Radiation-sensitive composition
JAPAN SYNTHETIC RUBBER CO LTD14 citations73
US5413896AMay 9, 1995
I-ray sensitive positive resist composition
JAPAN SYNTHETIC RUBBER CO LTD16 citations73