Inventor
RINZAN MOHAMED BUHARY
US6 patents
Patents
6 patentsUS11929270B2Mar 12, 2024
Unconsumed precursor monitoring
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Unconsumed precursor monitoring
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US12227846B2Feb 18, 2025
Monitoring thin film deposition
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US11175323B2Nov 16, 2021
Process monitoring using crystal with reactance sensor
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US10704150B2Jul 7, 2020
Monitoring thin film deposition
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US12266552B2Apr 1, 2025
System and method for monitoring semiconductor processes
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