Inventor
BURNS STUART M
US9 patents
⚠️ This page may combine multiple inventors who share the name “BURNS STUART M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS6461529B1Oct 8, 2002
Anisotropic nitride etch process with high selectivity to oxide and photoresist layers in a damascene etch scheme
IBM34 citations92
US6258679B1Jul 10, 2001
Sacrificial silicon sidewall for damascene gate formation
IBM41 citations92
US6143635ANov 7, 2000
Field effect transistors with improved implants and method for making such transistors
IBM37 citations92
US6040214AMar 21, 2000
Method for making field effect transistors having sub-lithographic gates with vertical side walls
IBM47 citations92
US6268226B1Jul 31, 2001
Reactive ion etch loading measurement technique
IBM31 citations91
US5895273AApr 20, 1999
Silicon sidewall etching
IBM48 citations91
US5976986ANov 2, 1999
Low pressure and low power C12 /HC1 process for sub-micron metal etching
IBM50 citations90
US6593617B1Jul 15, 2003
Field effect transistors with vertical gate side walls and method for making such transistors
IBM5 citations62