Inventor
WILLE WILLIAM C
US16 patents
⚠️ This page may combine multiple inventors who share the name “WILLE WILLIAM C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
14 patentsUS6621392B1Sep 16, 2003
Micro electromechanical switch having self-aligned spacers
IBM211 citations98
US7030031B2Apr 18, 2006
Method for forming damascene structure utilizing planarizing material coupled with diffusion barrier material
IBM69 citations95
US5811357ASep 22, 1998
Process of etching an oxide layer
IBM57 citations95
US7202513B1Apr 10, 2007
Stress engineering using dual pad nitride with selective SOI device architecture
IBM30 citations92
US6461529B1Oct 8, 2002
Anisotropic nitride etch process with high selectivity to oxide and photoresist layers in a damascene etch scheme
IBM34 citations92
US6143635ANov 7, 2000
Field effect transistors with improved implants and method for making such transistors
IBM37 citations92
US6093281AJul 25, 2000
Baffle plate design for decreasing conductance lost during precipitation of polymer precursors in plasma etching chambers
IBM19 citations92
US6040214AMar 21, 2000
Method for making field effect transistors having sub-lithographic gates with vertical side walls
IBM47 citations92
US7183130B2Feb 27, 2007
Magnetic random access memory and method of fabricating thereof
IBM27 citations90
US6207353B1Mar 27, 2001
Resist formulation which minimizes blistering during etching
IBM28 citations90
US7635899B2Dec 22, 2009
Structure and method to form improved isolation in a semiconductor device
IBM14 citations84
US6762667B2Jul 13, 2004
Micro electromechanical switch having self-aligned spacers
IBM10 citations73
US7550364B2Jun 23, 2009
Stress engineering using dual pad nitride with selective SOI device architecture
IBM4 citations63
US6593617B1Jul 15, 2003
Field effect transistors with vertical gate side walls and method for making such transistors
IBM5 citations62