Inventor
ASKARINAM ERIC
US10 patents
⚠️ This page may combine multiple inventors who share the name “ASKARINAM ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6077384AJun 20, 2000
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode
APPLIED MATERIALS INC237 citations98
US6074512AJun 13, 2000
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC236 citations98
US6054013AApr 25, 2000
Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC596 citations98
US6623596B1Sep 23, 2003
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode
APPLIED MATERIALS INC84 citations97
US6063233AMay 16, 2000
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC92 citations97
US6524432B1Feb 25, 2003
Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC49 citations95
US6454898B1Sep 24, 2002
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC43 citations95
US6514376B1Feb 4, 2003
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC22 citations92
US5722668AMar 3, 1998
Protective collar for vacuum seal in a plasma etch reactor
APPLIED MATERIALS INC41 citations92