Inventor
BUCHBERGER DOUGLAS
US23 patents
⚠️ This page may combine multiple inventors who share the name “BUCHBERGER DOUGLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS5874361AFeb 23, 1999
Method of processing a wafer within a reaction chamber
APPLIED MATERIALS INC172 citations99
US5684669ANov 4, 1997
Method for dechucking a workpiece from an electrostatic chuck
APPLIED MATERIALS INC125 citations99
US6252354B1Jun 26, 2001
RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control
APPLIED MATERIALS INC337 citations98
US6165311ADec 26, 2000
Inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC98 citations98
US6077384AJun 20, 2000
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode
APPLIED MATERIALS INC237 citations98
US6074512AJun 13, 2000
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC236 citations98
US6054013AApr 25, 2000
Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC596 citations98
US6623596B1Sep 23, 2003
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode
APPLIED MATERIALS INC84 citations97
US6063233AMay 16, 2000
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC92 citations97
US6024826AFeb 15, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC100 citations97
US6444085B1Sep 3, 2002
Inductively coupled RF plasma reactor having an antenna adjacent a window electrode
APPLIED MATERIALS INC54 citations96
US6218312B1Apr 17, 2001
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC61 citations96
US5916689AJun 29, 1999
Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect
APPLIED MATERIALS INC187 citations96
US5800871ASep 1, 1998
Electrostatic chuck with polymeric impregnation and method of making
APPLIED MATERIALS INC45 citations96
US5792562AAug 11, 1998
Electrostatic chuck with polymeric impregnation and method of making
APPLIED MATERIALS INC37 citations96
US6524432B1Feb 25, 2003
Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density
APPLIED MATERIALS INC49 citations95
US6454898B1Sep 24, 2002
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC43 citations95
US6514376B1Feb 4, 2003
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC22 citations92
US6440866B1Aug 27, 2002
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC22 citations92
US6036877AMar 14, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC30 citations92
US5990017ANov 23, 1999
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC32 citations92
US11387071B2Jul 12, 2022
Multi-source ion beam etch system
APPLIED MATERIALS INC0 citations52