Inventor
RODERICK CRAIG
US7 patents
Patents
7 patentsUS6252354B1Jun 26, 2001
RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control
APPLIED MATERIALS INC337 citations98
US6074512AJun 13, 2000
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC236 citations98
US6063233AMay 16, 2000
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC92 citations97
US6024826AFeb 15, 2000
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC100 citations97
US6454898B1Sep 24, 2002
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
APPLIED MATERIALS INC43 citations95
US6514376B1Feb 4, 2003
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
APPLIED MATERIALS INC22 citations92
US5990017ANov 23, 1999
Plasma reactor with heated source of a polymer-hardening precursor material
APPLIED MATERIALS INC32 citations92