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Inventor
LEE KEUN-IL
KR
2 patents
Patents
2 patents
US6723601B2
Apr 20, 2004
Method for manufacturing semiconductor memory device using hemispherical grain silicon
HYUNDAI ELECTRONICS IND
2 citations
59
US6518612B2
Feb 11, 2003
Semiconductor memory device using hemispherical grain silicon for bottom electrodes
HYUNDAI ELECTRONICS IND
2 citations
59