Inventor
CHEN CHUNG-TAI
TW6 patents
Patents
6 patentsUS6627001B2Sep 30, 2003
Method for cleaning a semiconductor wafer
MACRONIX INT CO LTD19 citations89
US6417095B1Jul 9, 2002
Method for fabricating a dual damascene structure
MACRONIX INT CO LTD15 citations80
US6524965B2Feb 25, 2003
Cleaning method for semiconductor manufacturing process to prevent metal corrosion
MACRONIX INT CO LTD10 citations70
US7723229B2May 25, 2010
Process of forming a self-aligned contact in a semiconductor device
MACRONIX INT CO LTD2 citations61
US6579812B2Jun 17, 2003
Method for removing residual polymer after the dry etching process and reducing oxide loss
MACRONIX INT CO LTD6 citations59
US6746970B2Jun 8, 2004
Method of forming a fluorocarbon polymer film on a substrate using a passivation layer
MACRONIX INT CO LTD0 citations51