Inventor
HO HENRY
US25 patents
⚠️ This page may combine multiple inventors who share the name “HO HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS6586343B1Jul 1, 2003
Method and apparatus for directing constituents through a processing chamber
APPLIED MATERIALS INC90 citations98
US6423949B1Jul 23, 2002
Multi-zone resistive heater
APPLIED MATERIALS INC534 citations98
US6645884B1Nov 11, 2003
Method of forming a silicon nitride layer on a substrate
APPLIED MATERIALS INC61 citations96
US6617553B2Sep 9, 2003
Multi-zone resistive heater
APPLIED MATERIALS INC59 citations95
US6066836AMay 23, 2000
High temperature resistive heater for a process chamber
APPLIED MATERIALS INC80 citations95
US7223323B2May 29, 2007
Multi-chemistry plating system
APPLIED MATERIALS INC44 citations92
US6646235B2Nov 11, 2003
Multi-zone resistive heater
APPLIED MATERIALS INC43 citations92
US6530992B1Mar 11, 2003
Method of forming a film in a chamber and positioning a substitute in a chamber
APPLIED MATERIALS INC40 citations92
US6582522B2Jun 24, 2003
Emissivity-change-free pumping plate kit in a single wafer chamber
APPLIED MATERIALS INC37 citations89
US6500266B1Dec 31, 2002
Heater temperature uniformity qualification tool
APPLIED MATERIALS INC30 citations88
US7520939B2Apr 21, 2009
Integrated bevel clean chamber
APPLIED MATERIALS INC12 citations84
US6652655B1Nov 25, 2003
Method to isolate multi zone heater from atmosphere
APPLIED MATERIALS INC14 citations84
US6802906B2Oct 12, 2004
Emissivity-change-free pumping plate kit in a single wafer chamber
APPLIED MATERIALS INC11 citations73
US6143084ANov 7, 2000
Apparatus and method for generating plasma
APPLIED MATERIALS INC14 citations71
US6116186ASep 12, 2000
Apparatus for cooling a plasma generator
APPLIED MATERIALS INC11 citations70
US6110284AAug 29, 2000
Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber
APPLIED MATERIALS INC4 citations63