Inventor
CHEN STEVEN A
US13 patents
⚠️ This page may combine multiple inventors who share the name “CHEN STEVEN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS5796074AAug 18, 1998
Wafer heater assembly
APPLIED MATERIALS INC609 citations99
US6586343B1Jul 1, 2003
Method and apparatus for directing constituents through a processing chamber
APPLIED MATERIALS INC90 citations98
US6645884B1Nov 11, 2003
Method of forming a silicon nitride layer on a substrate
APPLIED MATERIALS INC61 citations96
US6530992B1Mar 11, 2003
Method of forming a film in a chamber and positioning a substitute in a chamber
APPLIED MATERIALS INC40 citations92
US6559039B2May 6, 2003
Doped silicon deposition process in resistively heated single wafer chamber
APPLIED MATERIALS INC23 citations90
US6582522B2Jun 24, 2003
Emissivity-change-free pumping plate kit in a single wafer chamber
APPLIED MATERIALS INC37 citations89
US6726955B1Apr 27, 2004
Method of controlling the crystal structure of polycrystalline silicon
APPLIED MATERIALS INC14 citations84
US6559074B1May 6, 2003
Method of forming a silicon nitride layer on a substrate
APPLIED MATERIALS INC19 citations83
US6991999B2Jan 31, 2006
Bi-layer silicon film and method of fabrication
APPLIED MATERIALS INC11 citations81
US6802906B2Oct 12, 2004
Emissivity-change-free pumping plate kit in a single wafer chamber
APPLIED MATERIALS INC11 citations73
US6110284AAug 29, 2000
Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber
APPLIED MATERIALS INC4 citations63