P

Inventor

NAKAMURA YOSHINOBU

JP90 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA YOSHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

10 patents
US9263253B2Feb 16, 2016

Method of manufacturing a SiOCN film, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC9 citations84
US9218955B2Dec 22, 2015

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC7 citations84
US8951919B2Feb 10, 2015

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC6 citations84
US8728954B2May 20, 2014

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC6 citations84
US9895727B2Feb 20, 2018

Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9837262B2Dec 5, 2017

Method of manufacturing a SiOCN film, substrate processing apparatus and recording medium

HITACHI INT ELECTRIC INC2 citations73
US9455137B2Sep 27, 2016

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC3 citations73
US9390911B2Jul 12, 2016

Method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC5 citations73
US10229829B2Mar 12, 2019

Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations72
US10163625B2Dec 25, 2018

Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations72

SUMITOMO RUBBER IND

8 patents

MITSUI MINING & SMELTING CO

5 patents

TOA NENRYO KOGYO KK

4 patents

TOSHIBA KK

3 patents

FUJI XEROX CO LTD

3 patents

NIDEC CORP

3 patents

(unassigned)

2 patents

SHARP KK

2 patents

IRIE KOKEN KK

1 patent

CATERPILLAR MITSUBISHI LTD

1 patent

ALPS ELECTRIC CO LTD

1 patent

HIROSE YOSHIRO

1 patent

EXXONMOBIL RES & ENG CO

1 patent

NIHON SPINDLE MFG CO LTD

1 patent

ITOH SHIN

1 patent

KOKUSAI ELECTRIC CORP

1 patent

TONEN CORP

1 patent

NIPPON TELEGRAPH & TELEPHONE

1 patent

Showing the top 50 of 90 patents by PatentIndex Score.