Inventor
TING MAO-I
TW3 patents
Patents
3 patentsUS6799152B1Sep 28, 2004
Critical dimension statistical process control in semiconductor fabrication
MACRONIX INT CO LTD7 citations68
US6726774B2Apr 27, 2004
Bubble detection system for detecting bubbles in photoresist tube
MACRONIX INT CO LTD12 citations64
US6684164B1Jan 27, 2004
True defect monitoring through repeating defect deletion
MACRONIX INT CO LTD6 citations54