Inventor
KIRCHHOFF MARKUS
DE13 patents
⚠️ This page may combine multiple inventors who share the name “KIRCHHOFF MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
9 patentsUS6673693B2Jan 6, 2004
Method for forming a trench in a semiconductor substrate
INFINEON TECHNOLOGIES AG92 citations97
US7078313B2Jul 18, 2006
Method for fabricating an integrated semiconductor circuit to prevent formation of voids
INFINEON TECHNOLOGIES AG10 citations73
US6677218B2Jan 13, 2004
Method for filling trenches in integrated semiconductor circuits
INFINEON TECHNOLOGIES AG10 citations73
US7141507B2Nov 28, 2006
Method for production of a semiconductor structure
INFINEON TECHNOLOGIES AG9 citations69
US6759323B2Jul 6, 2004
Method for filling depressions in a surface of a semiconductor structure, and a semiconductor structure filled in this way
INFINEON TECHNOLOGIES AG5 citations62
US6713364B2Mar 30, 2004
Method for forming an insulator having a low dielectric constant on a semiconductor substrate
INFINEON TECHNOLOGIES AG5 citations62
US7368390B2May 6, 2008
Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process
INFINEON TECHNOLOGIES AG6 citations61
US6380076B2Apr 30, 2002
Dielectric filling of electrical wiring planes
INFINEON TECHNOLOGIES AG1 citations51
US6380074B1Apr 30, 2002
Deposition of various base layers for selective layer growth in semiconductor production
INFINEON TECHNOLOGIES AG0 citations48