Inventor
LEE PEY-YUAN
TW3 patents
Patents
3 patentsUS6710889B2Mar 23, 2004
Method for improved dielectric layer metrology calibration
TAIWAN SEMICONDUCTOR MFG6 citations58
US7196006B2Mar 27, 2007
Manufacturing method for microelectronic device
TAIWAN SEMICONDUCTOR MFG4 citations55
US6862545B1Mar 1, 2005
Linewidth measurement tool calibration method employing linewidth standard
TAIWAN SEMICONDUCTOR MFG3 citations54