Inventor
LO CHI-SHEN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “LO CHI-SHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS5783097AJul 21, 1998
Process to avoid dielectric damage at the flat edge of the water
TAIWAN SEMICONDUCTOR MFG28 citations92
US6485576B1Nov 26, 2002
Method for removing coating bead at wafer flat edge
TAIWAN SEMICONDUCTOR MFG8 citations64
US6710889B2Mar 23, 2004
Method for improved dielectric layer metrology calibration
TAIWAN SEMICONDUCTOR MFG6 citations58
US7196006B2Mar 27, 2007
Manufacturing method for microelectronic device
TAIWAN SEMICONDUCTOR MFG4 citations55
US6862545B1Mar 1, 2005
Linewidth measurement tool calibration method employing linewidth standard
TAIWAN SEMICONDUCTOR MFG3 citations54