Inventor
NAVALA SERGIY YAKOVLEVICH
KR4 patents
Patents
4 patentsUS7252716B2Aug 7, 2007
Gas injection apparatus for semiconductor processing system
SAMSUNG ELECTRONICS CO LTD234 citations97
US7210424B2May 1, 2007
High-density plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD21 citations91
US7404879B2Jul 29, 2008
Ionized physical vapor deposition apparatus using helical self-resonant coil
SAMSUNG ELECTRONICS CO LTD11 citations82
US7052583B2May 30, 2006
Magnetron cathode and magnetron sputtering apparatus comprising the same
SAMSUNG ELECTRONICS CO LTD3 citations61