Inventor
CEGLIO NAT
US4 patents
Patents
4 patentsUS7259869B2Aug 21, 2007
System and method for performing bright field and dark field optical inspection
KLA TENCOR TECH CORP19 citations90
US7095507B1Aug 22, 2006
Method and apparatus using microscopic and interferometric based detection
KLA TENCOR TECH CORP30 citations90
US7738089B2Jun 15, 2010
Methods and systems for inspection of a specimen using different inspection parameters
KLA TENCOR TECH CORP7 citations71
US8384887B2Feb 26, 2013
Methods and systems for inspection of a specimen using different inspection parameters
KLA TENCOR TECH CORP1 citations49