Inventor
AHO MARC
US6 patents
Patents
6 patentsUS7248364B2Jul 24, 2007
Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size
N & K TECHNOLOGY INC11 citations82
US7349103B1Mar 25, 2008
System and method for high intensity small spot optical metrology
N & K TECHNOLOGY INC10 citations81
US7397554B1Jul 8, 2008
Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage
N & K TECHNOLOGY INC6 citations61
US7616301B2Nov 10, 2009
Disc clamping device for multiple standard discs
N & K TECHNOLOGY INC5 citations60
US7327457B2Feb 5, 2008
Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes
N & K TECHNOLOGY INC5 citations60
US7330256B1Feb 12, 2008
Spectrophotometric system with reduced angle of incidence
N & K TECHNOLOGY INC0 citations50